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Client #308

Project Number 1

Summary:

Two possible cleaning methods were identified. The first was using laser ablation and the second utilized an alkaline based cleaner and ultrasonics. The ultrasonic cleaning took longer to clean the parts but worked better than the laser ablation. Follow up testing may include baking parts at elevated temperatures before cleaning with the ultrasonics.

Test Objective:

To identify new cleaning process for alumina based ceramic components used in semiconductor industry

Product Use:

Part of manufacturing equipment
Trial Number Date Run Purpose Success Rating
0 09/19/2008 To screen potential alternative cleaning products Preliminary compatibility tests on substrate coupons encouraging for at least one cleaning chemistry. More in-depth laboratory testing necessary.
1 10/02/2008 To further evaluate baking soda blasting for removing oxides and carbon deposits from ceramic part. A follow up test, usually based on company input.
2 10/02/2008 To evaluate laser ablation cleaning technology for removal of carbon deposits and oxides from ceramic parts. Results suggest a scale-up feasible match for cleaning chemistry and equipment. Pilot plant study with actual parts recommended.
3 12/09/2008 To evaluate ultrasonic cleaning on supplied ceramic parts Results suggest a scale-up feasible match for cleaning chemistry and equipment. Pilot plant study with actual parts recommended.