Project #1
To replace Xylene in cup cleaning operation (and preferably use of an non-voc)
06/15/1999
316 SS, aluminum and polypropylene
To collect excess photoresist from wafers (silicone)
2 stainless steel parts, 2 aluminum parts and one polypropylene part
4 inches diameter x 3 inches deep
Small
application of photoresist
application of photoresist
4-5 cups and tubes
Xylene
Odor, staining of floor, clothes (spent solution)
To remove negative photoresist from cups and tubes. Can block exhaust
No relation
Used Immediately
After initial testing several products showed good results in removing the negative photoresist.