Project #1
Identify environmentally safe cleaning process for a glass part
07/05/1995
base for depositing interferometer grating
2.75 inches diameter x 0.08 inches thick disk
Less than 1 lb
from vendor
spin coat hexamethyldisilazane
50
10
Xylene, Acetone, Methanol
Doesn't produce "water break free" surface. Dubious adhesion of photoresist.
Produce surface suitable for bonding to hexamtheyldisilazane which is itself a primer adhesion promoter for a photoresist.
in N2 atmosphere
durability of photoresist coating
We are going to try a sulfuric acid / hydrogen peroxide cleaner. An alternative is ethanol/disodium hydroxide. Are there better cleaning systems?
Testing yield two possible cleaning systems and cleaners. These included Ultrasonics and Immersion tanks using Oakite Inproclean 3800 and Alconox Alcojet.