Project #2
To identify contaminants on rejected parts.
08/07/2001
BeO, Al N, Al2O3
substrates for semiconductors
20% BeO, 70% Al N, 10% Al2O3
2 x 2 x 0.03
Small
Less than 1 lb
lapping and polishing
exam
10-1000
10-60
Methyl Ethyl Ketone, Oakite, Amberclean
It is inconsistent.
to prepare ceramic surfaces for metallization
Using FT-IR, the contamination has been identified as being toluene and/or the wax.