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Client #211


Microelectronics Mfr

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Project Number 1


Using the laboratory's database for solvent cleaning substitution, the lab generated the following lists of products. The products have been evaluated at SSL under similar conditions to the client's criteria.

Test Objective:

To find an alternative to acetone

Product Use:

Semiconductor tools, heat chamber
Trial Number Date Run Purpose Success Rating
0 08/25/2003 To identify a list of products that could be used to remove various metal working fluids from vacuum chambers. Technology Transfer.