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Project Number 1
Summary:Two possible cleaning methods were identified. The first was using laser ablation and the second utilized an alkaline based cleaner and ultrasonics. The ultrasonic cleaning took longer to clean the parts but worked better than the laser ablation. Follow up testing may include baking parts at elevated temperatures before cleaning with the ultrasonics.
Test Objective:To identify new cleaning process for alumina based ceramic components used in semiconductor industry
Product Use:Part of manufacturing equipment